e/Surface analysis tools

Information
has gloss	eng: Surface analysis tools are instruments and spectrometers that use surface analysis techniques such as AES (Auger Electron Spectroscopy) sometimes called Scanning Auger Microscopy (SAM); XPS (X-ray photoelectron spectroscopy) also known as ESCA (Electron Spectroscopy for Chemical Analysis); and SIMS (Secondary ion mass spectrometry) to characterize the composition and structure of the top few layers of atoms in a surface. Note that there are numerous related techniques which may also qualify as "surface analysis".
lexicalization	eng: Surface analysis tools
instance of	(noun) spectroscope for obtaining a mass spectrum by deflecting ions into a thin slit and measuring the ion current with an electrometer mass spectrometer, spectrometer