| Information | |
|---|---|
| has URI | http://lexvo.org/id/term/jpn/%E5%8F%8D%E5%BF%9C%E6%80%A7%E3%82%A4%E3%82%AA%E3%83%B3%E3%82%A8%E3%83%83%E3%83%81%E3%83%B3%E3%82%B0 |
| character | Character U+53CD |
| character | Character U+5FDC |
| character | Character U+6027 |
| Meaning | |
|---|---|
| means | e/Reactive-ion etching |
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